Fabrication of Superconducting Nb airbridges in a 300mm Pilot line for Quantum Technologies

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Authors: Danny Wan, Massimo Mongillo, Yann Canvel, Daniel Perez Lozano, Bert Tobback, Tsvetan Ivanov, Antoine Pacco, Xiaoyu Piao, Shana Massar, Anton Potočnik, and Kristiaan De Grev

Journal title: IEEE

Journal publisher: IEEE

Published year: 2024