300 mm CMOS-compatible superconducting HfN and ZrN thin films for quantum applications

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Authors: Roman Potjan, Marcus Wislicenus, Oliver Ostien, Raik Hoffmann, Maximilian Lederer, André Reck, Jennifer Emara, Lisa Roy, Benjamin Lilienthal-Uhlig, J. Wosnitza

Journal title: Appl. Phys. Lett.

Journal publisher: American Institute of Physics

Published year: 2023

DOI identifier: 10.1063/5.0176060

ISSN: 0003-6951