Investigations at low temperature of 90 nm pitch BEOL for quantum applications

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Authors: R. Segaud, P. Gergaud, S. Minoret, P. Neumann, F. Gustavo, A. Royer, C. Licitra, D. Mariolle, F. Nemouchi

Journal publisher: SPIE2023

Published year: 2022

DOI identifier: 10.1109/iitc52079.2022.9881302