Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification

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Authors: Daniel Pérez Lozano1, Massimo Mongillo2, Xiaoyu Piao3, Sebastien Couet4, Danny Wan1, Yann Canvel5, A. M. Vadiraj1, Tsvetan Ivanov1, Jeroen Verjauw1, Rohith Acharya1, Jacques Van Damme6, Mohiyaddin A. Fahd7, Julien Jussot8, Pallavi Puttarame Gowda1, Antoine Pacco1, Bart Raes1, Joris Van de Vondel9, Iuliana Radu10, Bogdan Govoreanu1, Johan Swerts4, Anton Potocnik11 and Kristiaan DeGreve1

Journal title: IOP

Journal publisher: IOP Publishing

Published year: 2024

DOI identifier: 10.1088/2633-4356/ad4b8c

ISSN: 2633-4356