Inline LIPSS Monitoring Method Employing Light Diffraction

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Authors: Aleksandra Michalek, Tahseen Jwad, Pavel Penchev, Tian Long See, Stefan Dimov

Journal title: Journal of Micro and Nano-Manufacturing

Journal number: 8/1

Journal publisher: ASME

Published year: 2020

DOI identifier: 10.1115/1.4045681

ISSN:2166-0468