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Authors: Mariana Ballottin, Nico Jansen, Andrea Scheidegger, Erhan Ercan, Jan Matthijs ter Meulen
Journal title: Proc. SPIE 12957, Advances in Patterning Materials and Processes XLI
Journal publisher: SPIE
Published year: 2024
DOI identifier: 10.1117/12.3009860
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