Advanced characterization of 2D materials using SEM image processing and machine learning

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Authors: Mohamed Saib, Alain Moussa, Matteo Beggiato, Benjamin Groven, Henry Medina Silva, Pierre Morin, Janusz Bogdanowicz, Gouri Sankar Kar, Anne-Laure Charley

Journal title: Metrology, Inspection, and Process Control XXXVIII

Journal publisher: SPIE

Published year: 2024

Published pages: 31

DOI identifier: 10.1117/12.3014378