Non-destructive roughness analysis of high aspect ratio rectangular grating sidewalls for nanostructured silicon wafer

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Authors: Loaldi, Dario; Quagliotti, Danilo; Calaon, Matteo; Czolkos, Ilja; Johansson, Alicia; Nielsen, Theodor; Garnæs, Jørgen and Tosello, Guido

Journal publisher: euspenÂ’s 20th International Conference & Exhibition

Published year: 2020