Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification

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Authors: Berke Erbas, Ana Conde-Rubio, Xia Liu, Joffrey Pernollet, Zhenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero and Juergen Brugger

Journal title: Microsystems & Nanoengineering

Journal publisher: Springer Nature

Published year: 2024

DOI identifier: 10.1038/s41378-024-00655-y

ISSN: 2055-7434