Nanofabrication Process Scale-Up via Displacement Talbot Lithography of a Plasmonic Metasurface for Sensing Applications

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Authors: Pellacani, P.; Jefimovs, K.; Angelini, M.; Marabelli, F.; Tolardo, V.; Kazazis, D.; Floris, F.

Journal title: Optics

Journal publisher: MDPI

Published year: 2024

DOI identifier: 10.3390/opt5010012

ISSN: 2673-3269