Drift Region Epitaxy Development and Characterization for High Blocking Strength and Low Specific Resistance in Vertical GaN Based Devices

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Authors: E. Bahat Treidel, F. Brunner, E. Brusaterra, M. Wolf, A. Thies, J. Würfl, O. Hilt

Journal title: Int. Conf. on Compound Semiconductor Manufacturing Technology (CS ManTech 2023)

Journal publisher: CS ManTech

Published year: 2023