Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices

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Authors: E. Brusaterra, E. Bahat Treidel , A. Külberg, F. Brunner, M. Wolf, O. Hilt

Journal title: International Conference on Compound Semiconductor Manufacturing Technology (CS mantech) 2024

Journal publisher: CS mantech

Published year: 2024