Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: D. Tselekidou, K. Papadopoulos, A. Zachariadis, V. Kyriazopoulos, S. Kassavetis, A. Laskarakis, M. Gioti
Journal title: Materials Science in Semiconductor Processing
Journal number: 163
Journal publisher: Elsevier BV
Published year: 2023
DOI identifier: 10.1016/j.mssp.2023.107546
ISSN: 1369-8001