Mechanically Stable PMMA‐Based Large‐Area Nano‐Channels with Sub‐10 nm Depth

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Authors: Min Liu, Tobias Reimer, Yongkang Wang, Mathias Kläui, Yaowen Xing, Xiahui Gui, Yijun Cao, Rüdiger Berger, Hai Wang, Mischa Bonn

Journal title: Advanced Materials Technologies

Journal publisher: Wiley

Published year: 2024

DOI identifier: 10.1002/admt.202401172

ISSN: 2365-709X