Low-loss SiGe waveguides for mid-infrared photonics fabricated on 200 mm wafers

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Authors: Victor Turpaud; Thi-Hao-Nhi Nguyen; Hamza Dely; Natnicha Koompai; Annabelle Bricout; Jean-Michel Hartmann; Nicolas Bernier; Julia Krawczyk; Gabriel Lima; Samson Edmond; Etienne Herth; Carlos Alonso-Ramos; Laurent Vivien; Delphine Marris-Morini

Journal title: Optics Express

Journal publisher: Optical Society of America

Published year: 2024

DOI identifier: 10.1364/OE.521925

ISSN: 1094-4087