Summary
This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.
Authors: Morten Vollmann, Cosmin Roman, and Christofer Hierold
Journal title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Journal publisher: IEEE
Published year: 2024
DOI identifier: 10.1109/mems58180.2024.10439427
ISBN: 9798350357929