Challenges in Electron Beam Lithography of Silicon Nanostructures

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Authors: C Cakirlar, G Galderisi, C Beyer, M Simon, T Mikolajick, J Trommer

Journal title: IEEE 22nd International Conference on Nanotechnology (IEEE NANO)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/nano54668.2022.9928629

ISBN: 978-1-6654-5225-0