A Study of the Variability and Design Considerations of Ferroelectric VNAND Memories With Polycrystalline Films Using An Experimentally Validated TCAD Model

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Authors: Thesberg M, Schanovsky F, Stanojević Z, Baumgartner O, Karner M.

Journal title: ESSDERC 2023 - IEEE 53rd European Solid-State Device Research Conference (ESSDERC)

Journal publisher: IEEE

Published year: 2023

DOI identifier: 10.1109/essderc59256.2023.10268518

ISBN: 979-8-3503-0423-7