3D nanofabricated soft microrobots with super-compliant picoforce springs as onboard sensors and actuators

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Authors: Haifeng Xu, Song Wu, Yuan Liu, Xiaopu Wang, Artem K. Efremov, Lei Wang, John S. McCaskill, Mariana Medina-Sánchez, Oliver G. Schmidt

Journal title: Nature Nanotechnology

Journal number: 19

Journal publisher: Springer Science and Business Media LLC. 2024

Published year: 2024

Published pages: 494-503

DOI identifier: 10.1038/s41565-023-01567-0

ISSN: 1748-3395