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Authors: Nikita M. Ryskin, Roman A. Torgashov, Andrey V. Starodubov, Andrey G. Rozhnev, Alexey A. Serdobintsev, Anton M. Pavlov, Viktor V. Galushka, Dmitry A. Bessonov, Giacomo Ulisse, Viktor Krozer
Journal title: Journal of Vacuum Science & Technology B
Journal number: 39/1
Journal publisher: AVS Science and Technology Society
Published year: 2021
Published pages: 013204
DOI identifier: 10.1116/6.0000716
ISSN: 2166-2754