Strain relaxation from annealing of SiGe heterostructures for qubits

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Authors: Yujia Liu, Kevin-Peter Gradwohl, Chen-Hsun Lu, Kaspars Dadzis, Yuji Yamamoto, Lucas Becker, Peter Storck, Thilo Remmele, Torsten Boeck, Carsten Richter, Martin Albrecht

Journal title: Journal of Applied Physics

Journal number: 134

Journal publisher: American Institute of Physics

Published year: 2023

DOI identifier: 10.1063/5.0155448

ISSN: 0021-8979