An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array

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Authors: Andreas Neudert, Peter Duerr, Mario Nitzsche

Journal title: Micromachines

Journal number: 15

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2024

Published pages: 942

DOI identifier: 10.3390/mi15080942

ISSN: 2072-666X