MEMS-on-CMOS integration of a holographic 8M-Pixel SLM device using KrF-Lithography

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Authors: S. Döring, P. A. Recknagel, C. Hohle, P. Dürr

Journal title: SPIE Advanced Lithography 2024

Journal publisher: SPIE Advanced Lithography 2024

Published year: 2024