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Authors: Jun Maruyama, Shohei Maruyama, Setsuko Shibuya, Yoshiyuki Nonoguchi, Zyun Siroma
Journal title: Thin Solid Films
Journal number: 800
Journal publisher: Elsevier Sequoia
Published year: 2024
Published pages: 140412
DOI identifier: 10.1016/j.tsf.2024.140412
ISSN: 0040-6090