Directly Silicon Nitride Waveguide Coupled Ge Photodiode for Non-SOI PIC and Epic Platforms

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Authors: Stefan Lischke, Dieter Knoll, Christian Mai, Karsten Voigt, Anne Hesse, Galina Georgieva, Anna Peczek and Lars Zimmermann

Journal title: ECS Transactions

Journal number: Volume 98, Number 5

Journal publisher: ECS Transactions

Published year: 2020

DOI identifier: 10.1149/09805.0315ecst