Silicon nitride waveguide coupled 67+ GHz Ge photodiode for non-SOI PIC and ePIC platforms

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Authors: S. Lischke, D. Knoll, C. Mai, A. Hesse, G. Georgieva, A. Peczek, A. Kroh, M. Lisker, D. Schmidt, M. Fraschke, H. Richter, A. Krüger, U. Saarow, P. Heinrich, G. Winzer, K. Schulz, P. Kulse, A. Trusch, and L. Zimmermann

Journal title: 2019 IEEE International Electron Devices Meeting (IEDM)

Journal publisher: IEEE

Published year: 2019

Published pages: pp. 33.2.1-33.2.4

DOI identifier: 10.1109/iedm19573.2019.8993651