Stabilization of ferroelectric Hf x Zr 1−x O 2 films using a millisecond flash lamp annealing technique

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Authors: Éamon O’Connor, Mattia Halter, Felix Eltes, Marilyne Sousa, Andrew Kellock, Stefan Abel, Jean Fompeyrine

Journal title: APL Materials

Journal number: 6/12

Journal publisher: AIP publishing

Published year: 2018

Published pages: 121103

DOI identifier: 10.1063/1.5060676

ISSN: 2166-532X