Hybrid microfabrication of 3D pyrolytic carbon electrodes by photolithography and additive manufacturing

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Authors: Jesper Y. Pan, Babak Rezaei, Thomas A. Anhøj, Niels B. Larsen, Stephan S. Keller

Journal title: Micro and Nano Engineering

Journal number: 15

Journal publisher: Elsevier

Published year: 2023

Published pages: 100124

DOI identifier: 10.1016/j.mne.2022.100124

ISSN: 2590-0072