Fabrication of pyrolytic carbon interdigitated microelectrodes by maskless UV photolithography with epoxy-based photoresists SU-8 and mr-DWL

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Authors: Nicolai Støvring, Babak Rezaei, Arto Heiskanen, Jenny Emnéus, Stephan Sylvest Keller

Journal title: Micro and Nano Engineering

Journal number: 23

Journal publisher: Elsevier

Published year: 2024

Published pages: 100257

DOI identifier: 10.1016/j.mne.2024.100257

ISSN: 2590-0072