Wafer-level hermetically sealed silicon photonic MEMS

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Authors: Gaehun Jo, Pierre Edinger, Simon J. Bleiker, Xiaojing Wang, Alain Yuji Takabayashi, Hamed Sattari, Niels Quack, Moises Jezzini, Jun Su Lee, Peter Verheyen, Iman Zand, Umar Khan, Wim Bogaerts, Gran Stemme, Kristinn B. Gylfason, Frank Niklaus

Journal title: Photonics Research

Journal number: 10

Journal publisher: OPTICA

Published year: 2022

Published pages: A14

DOI identifier: 10.1364/prj.441215

ISSN: 2327-9125