Studying the interaction of scanner materials with EUV generated plasma

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Authors: Aneta Stodólna, Thomas Mechielsen, Kleopatra Papamichou, S. Oostrom, M. van de Kerkhof, V. Navarro Parders

Journal title: ESCAMPIG 2024

Journal publisher: ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases

Published year: 2024