Unveiling the individual impact of hydrogen radicals and vacuum EUV photons on pellicle-like materials under varying thermal conditions

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Authors: Görsel Yetik, Herman Bekman, Jacqueline van Veldhoven, Shriparna Mukherjee, Karima Tabakkouht, and Henk Lensen

Journal title: International Conference on Extreme Ultraviolet Lithography 2024

Journal number: Proc. SPIE PC13215,

Journal publisher: SPIE

Published year: 2024