EUV-induced hydrogen plasma and particle release

Summary

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Authors: Mark van de Kerkhof, Andrei M. Yakunin, Vladimir Kvon, Andrey Nikipelov, Dmitry Astakhov, Pavel Krainov, Vadim Banine

Journal title: Radiation Effects and Defects in Solids

Journal number: 177

Journal publisher: Taylor & Francis

Published year: 2022

Published pages: 486-512

DOI identifier: 10.1080/10420150.2022.2048657

ISSN: 1042-0150