Effect of vibration-isolation measures on AFM height measurement

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Authors: Milan Pavúk, Róbert Hinca, Vladimír Slugeň

Journal title: AIP Conference Proceedings, APPLIED PHYSICS OF CONDENSED MATTER (APCOM 2024)

Journal number: 3251

Journal publisher: AIP Publishing

Published year: 2024

DOI identifier: 10.1063/5.0238704

ISSN: 1551-7616