Simple method for quality factor estimation in resonating MEMS structures

Summary

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Authors: S Larsson, P Johannisson, D Kolev, F Ohlsson, S Nik, J Liljeholm, T Ebefors, C Rusu

Journal title: Journal of Physics: Conference Series

Journal number: 1052

Journal publisher: Institute of Physics

Published year: 2018

Published pages: 012100

DOI identifier: 10.1088/1742-6596/1052/1/012100

ISSN: 1742-6588