Toward CMOS compatible wafer-scale fabrication of carbon-based microsupercapacitors for IoT

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Authors: A D Smith, Q Li, A Anderson, A Vyas, V Kuzmenko, M Haque, L G H Staaf, P Lundgren, P Enoksson

Journal title: Journal of Physics: Conference Series

Journal number: 1052

Journal publisher: Institute of Physics

Published year: 2018

Published pages: 012143

DOI identifier: 10.1088/1742-6596/1052/1/012143

ISSN: 1742-6588