The influence of magnetic field on the cluster growth in a magnetron sputtering gas aggregation source

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Authors: Joao Coroa, Giuseppe Sanzone, Tibor Höltzl, Hailin Sun, Ewald Janssens, Jinlong Yin

Journal title: Surface and Coatings Technology

Journal number: 500

Journal publisher: Elsevier BV

Published year: 2025

Published pages: 131892

DOI identifier: 10.1016/j.surfcoat.2025.131892

ISSN: 0257-8972