Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate

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Authors: Rashid Ali, Marco Renzelli, M. Khan, Marco Sebastiani, Edoardo Bemporad

Journal title: Nanomaterials

Journal number: 8/11

Journal publisher: MDPI

Published year: 2018

Published pages: 896

DOI identifier: 10.3390/nano8110896

ISSN: 2079-4991