Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

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Authors: Grégory Abadias, Eric Chason, Jozef Keckes, Marco Sebastiani, Gregory B. Thompson, Etienne Barthel, Gary L. Doll, Conal E. Murray, Chris H. Stoessel, Ludvik Martinu

Journal title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Journal number: 36/2

Journal publisher: American Institute of Physics

Published year: 2018

Published pages: 020801

DOI identifier: 10.1116/1.5011790

ISSN: 0734-2101