Nano-Scale Residual Stress Profiling in Thin Multilayer Films with Non-Equibiaxial Stress State

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Authors: Marco Sebastiani, Edoardo Rossi, Muhammad Zeeshan Mughal, Alessandro Benedetto, Paul Jacquet, Enrico Salvati, Alexander M. Korsunsky

Journal title: Nanomaterials

Journal number: 10/5

Journal publisher: MDPI

Published year: 2020

Published pages: 853

DOI identifier: 10.3390/nano10050853

ISSN: 2079-4991