Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process

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Authors: Yingying Li, Simon J. Bleiker, Elliott Worsey, Maël Dagon, Pierre Edinger, Alain Yuji Takabayashi, Niels Quack, Peter Verheyen, Wim Bogaerts, Kristinn B. Gylfason, Dinesh Pamunuwa, Frank Niklaus

Journal title: Microsystems & Nanoengineering

Journal number: 11

Journal publisher: Springer Science and Business Media LLC

Published year: 2025

DOI identifier: 10.1038/S41378-025-00964-W

ISSN: 2055-7434