Branch selection and data optimization for selecting machines for processes in semiconductor manufacturing using AI-based predictions

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Authors: Peter Stich, Rebecca Busch, Michael Wahl, Christian Weber, Madjid Fathi

Journal title: 2021 IEEE International Conference on Electro Information Technology (EIT)

Journal publisher: IEEE

Published year: 2021

Published pages: 1-6

DOI identifier: 10.1109/eit51626.2021.9491836

ISBN:978-1-6654-1846-1