Investigation of the Airborne Molecular Contamination Behavior in 300 mm Semiconductor Front - End Manufacturing

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Authors: Peter Franze, Germar Schneider, Clara Zaengle, Markus Pfeffer, Stefan Kaskel

Journal title: International Journal of Materials Science and Applications

Journal number: 9/1

Journal publisher: Science Publishing Group

Published year: 2020

Published pages: 14

DOI identifier: 10.11648/j.ijmsa.20200901.13

ISSN:2327-2635