A Planning Approach for an Effective Digitalization of Processes in Mature Semiconductor Production Facilities

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Authors: Sophia Keil, Fabian Lindner, Germar Schneider, Tobias Jakubowitz

Journal title: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Journal publisher: IEEE

Published year: 2019

Published pages: 1-6

DOI identifier: 10.1109/asmc.2019.8791830

ISBN:978-1-5386-7601-1