Integration of MEMS-based plasma emission sources in a low volume flow cell

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Authors: Abelia Ellingsen, Karolina Milenko, Enrique Escobedo-Cousin, Do Chi Huong Hoang, Simone Zonetti, Alessandro Liberale, Elizaveta Vereshchagina

Journal title: The 37th European Conference on Solid-State Transducers EUROSENSORS 2025

Journal publisher: AMA Service GmbH

Published year: 2025

DOI identifier: 10.5162/EUROSENSORS2025/MP47