Polymerization Photoinitiators with Near-Resonance Enhanced Two-Photon Absorption Cross-Section: Toward High-Resolution Photoresist with Improved Sensitivity

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Authors: Caroline Arnoux, Tatsuki Konishi, Emma Van Elslande, Eric-Aimé Poutougnigni, Jean-Christophe Mulatier, Lhoussain Khrouz, Christophe Bucher, Elise Dumont, Kenji Kamada, Chantal Andraud, Patrice Baldeck, Akos Banyasz, Cyrille Monnereau

Journal title: Macromolecules

Journal number: 53/21

Journal publisher: American Chemical Society

Published year: 2020

Published pages: 9264-9278

DOI identifier: 10.1021/acs.macromol.0c01518

ISSN: 0024-9297