Proximity effect in parallelized microfabrication using two-photon polymerization

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Authors: Luis Adrian Pérez Covarrubias, Caroline Arnoux, Quentin Carlier, Alexandre Khaldi, Patrice Baldeck, Kevin Heggarty

Journal title: 3D Printed Optics and Additive Photonic Manufacturing II

Journal number: Volume 11349, 3D Printed Optics and Additive Photonic Manufacturing II; 113490O March 2020

Journal publisher: Society of Photo-Optical Instrumentation Engineers (SPIE

Published year: 2020

Published pages: 26

DOI identifier: 10.1117/12.2555377

ISBN: 9781510634718