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Authors: Benedikt Stender, Willi Mantei, Alexander Krupp, Valentin Ratz, Fabian Hilbert, Ruth Houbertz
Journal title: Advances in Patterning Materials and Processes XXXV
Journal number: Volume 10586, Advances in Patterning Materials and Processes XXXV, 1058614 March 2018
Journal publisher: Society of Photo-Optical Instrumentation Engineers (SPIE)
Published year: 2018
Published pages: 40
DOI identifier: 10.1117/12.2297404
ISBN: 9781510616653