Experimental Wafer Carrier Contamination Analysis and Monitoring in Fully Automated 300 mm Power Production Lines

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Authors: Clara Zängle, Markus Pfeffer, Peter Franze, Germar Schneider, Anton Bauer

Journal title: Solid State Phenomena

Journal number: 314

Journal publisher: Scientific.net

Published year: 2021

Published pages: 34-40

DOI identifier: 10.4028/www.scientific.net/ssp.314.34

ISSN:1662-9779