Yield prediction in semiconductor manufacturing using an AI-based cascading classification system

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Authors: Peter Stich, Michael Wahl, Peter Czerner, Christian Weber, Madjid Fathi

Journal title: 2020 IEEE International Conference on Electro Information Technology (EIT)

Journal publisher: IEEE

Published year: 2020

Published pages: 609-614

DOI identifier: 10.1109/eit48999.2020.9208250

ISBN:978-1-7281-5317-9